KOR


Heating Valve

Overview & Features

The Heating Valve is installed in semiconductor, LCD, LED, and OLED manufacturing equipment. It is typically mounted between the pump and scrubber or inside the scrubber, maintaining the user-set temperature to prevent powder adhesion inside the valve.

  • Heated clamp section with aerogel insulation.
  • INTER-LOCK: Built-in bimetal prevents overheating.
  • Valve flange and pipe inner diameters are aligned for superior flow performance.
  • Uniform valve bore eliminates load caused by taper shapes.
  • Dual heating wires allow immediate switching to a backup wire if the main wire is disconnected.
  • Extended heating area minimizes heat loss zones.
  • Stable temperature rise contributes to longer product lifespan.
  • Our heater design is compatible with other brands’ 3-way valves.

Production Specifications

Items NW40 NW50
Connection ISO KF Flanges ISO KF Flanges
Pressure range 10kgf/㎠ 10kgf/㎠
Pressure resistance PN30(without flange tube) PN30(without flange tube)
Material Housing Stainless steel Stainless steel
Flange Stainless steel Stainless steel
Ball Seat R-TFE / FFKM (max. 260℃) R-TFE / FFKM (max. 260℃)
Drive Packing R-TFE / FFKM (max. 260℃) R-TFE / FFKM (max. 260℃)
Heater Max temp. 220℃ 220℃
Power 220VAC 220VAC
Capacity 170W 220W
Heater Element NCHW-1 NCHW-1
Thermocouple K-type K-type
Trip Temperature Bimetal 250℃ Bimetal 250℃
Visual position indicator Proximity sensor(standard)
Micro switch(option)		 Proximity sensor(standard)
Micro switch(option)
Option Other connections
Pneumatic and electric actuator		 Other connections
Pneumatic and electric actuator