KOR

R&D Achievements

“We are dedicated to ceaseless research and development
for our customers' needs and a brighter future.”

2024

  • Patent
  • KR 10-2647865Ball Valve Assembly with Dissimilar Ball Seat Materials

2023

  • Patent
  • KR 10-2535847Heat Pipe Protective Cover Assembly

2020

  • Patent
  • KR 10-2189754Three-Way Valve Assembly

2019

  • Patent
  • KR 10-2054945Heating Jacket with External Insulation Layer

2018

  • Patent
  • KR 10-1959266Fixing Jig for Discharge Line of Semiconductor Manufacturing Equipment
  • Patent
  • KR 10-1982607Automatic Washing and Drying Device for Slurry Filters Used in CMP Process
  • Patent
  • KR 10-1858201Automatic Fastening and Separation Device for Slurry Filters in CMP Process
  • Patent
  • KR 10-1959266Fixing Jig for Discharge Line of Semiconductor Manufacturing Equipment

2017

  • Patent
  • KR 10-1927837Three-Way Valve with Temperature Retention Function

2015

  • Patent
  • KR 10-1525423Ion Generator and Ion Injection Device Utilizing Same
  • Patent
  • KR 10-1646537Cooling Unit for Control Motor

2014

  • Patent
  • KR 10-1495668Heating Jacket with Multiple Heating Wires
  • Patent
  • KR 10-1509476Hybrid Heater for Preventing Powder Accumulation and Gas Heating

2013

  • Patent
  • KR 10-1307137Powder Blocking Device for Discharge Line of Semiconductor Manufacturing Equipment
  • Patent
  • KR 10-1319530Heating Jacket Control Device
  • Patent
  • KR 10-1368336Discharge Line Assembly of Semiconductor Manufacturing Equipment for Preventing Powder Adhesion

2009

  • Patent
  • KR 10-0923279Heating Jacket Control Device and Method, and Display Method Thereof

2008

  • Patent
  • KR 10-0860593Double Corrugated Tube with Heating Function and Manufacturing Method Thereof
  • Patent
  • KR 10-0860596Cooling Jacket for Gas Exhaust Pipe of Semiconductor Manufacturing Equipment