KOR

Heating Jacket

Overview of Heating Jacket

The heating jacket is also known as heater jacket, heat jacket, or jacket heater, but our company refers to it as Heating Jacket.

The heating jacket helps reduce human, material, and economic losses caused by powder accumulation in gas exhaust pipes during semiconductor and other manufacturing processes, which can lead to equipment performance degradation, reduced production yield, and periodic preventive maintenance.

Our product is CE certified, made from special high-temperature resistant raw materials, and includes various safety devices to ensure safe use and excellent performance.

Applicable processes or products include:

  • Semiconductor, PV, FPD, LED
  • Etch, PECVD, Nitride, TEOS
  • Fore Line, Pump Line, Exhaust Line
  • Vacuum bake-out
  • Gas Lines, etc.

Features of the Heating Jacket

  • Various Forms
    Flexible materials allow adaptation to various shapes of heated objects (length, thickness).
  • Lightweight
    Made with high-purity E-Glass Fiber for inner and outer layers, making it lighter than heaters made of other materials.
  • Excellent Adhesion
    The raw materials are highly flexible, ensuring excellent adherence to the target object.
  • Ensured Safety
    Equipped with Thermocouple, Bimetal, and Temperature Fuse to prevent fire caused by overheating.

Structure of the Heating Jacket

The basic structure places the inner lining that contacts the pipe at the innermost position, with heating wires arranged inside. The positions of bimetal and temperature sensors are set here. Insulation material is layered on top to prevent heat loss from the heating element, which is then covered and sealed with an outer layer. Finally, fasteners (velcro, buttons, etc.) are attached.

Manufacturing Process

  • Raw and Auxiliary Materials Raw materials (inner lining, outer lining, insulation, etc.) and auxiliary materials (fasteners, connectors, cables, etc.)
  • Design & Cutting Materials are designed according to equipment blueprints and cut automatically.
  • Sewing (Assembly) Inner lining (heating wires), insulation, and outer lining are sewn, followed by assembly of connectors and fasteners.
  • Testing Insulation resistance and dielectric strength are measured, and out-gassing is checked through aging tests.

Images

  • Fabric Order Type
  • Fabric Order Type
  • Fabric Order Type
  • Fabric Order Type
  • Fabric Order Type
  • Fabric Order Type
  • Fabric Elbow Straight Type
  • Fabric Straight Type
  • Fabric Order Type
  • Rubber Straight Type
  • Rubber Elbow Straight Type
  • Rubber Valve Type
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Production Specifications

No Items Fabric Type Rubber Type
1 Temperature 120~180℃(최대 250℃) 120~180℃(최대 250℃)
2 Voltage 220VAC(50/60Hz) 220VAC(50/60Hz)
3 Outter Silicone coated E-glass cloth
PTFE coated E-glass cloth
Silica cloth, PTFE cloth
Dual mirror aluminized cloth		 Silicone rubber fabric
4 Inner Silicone coated E-glass cloth
PTFE coated E-glass cloth
Silica cloth		 Silicone rubber fabric
5 Insulation Silica needle mat
Fiber galss		 Silicone sponge
Silicone pad
6 Heat Wire Nickel-chrome wire(NCHW-1) Nickel-chrome wire(NCHW-1)
7 Inter-lock(option) Bimetal, Thermal Fuse Bimetal, Thermal Fuse
8 Sensor K-type, PT100Ω-type K-type, PT100Ω-type
9 Fastener Velcro, Snap Button Snap Button